High-resolution microscopy through optically opaque media using ultrafast photoacoustics
Author:
Funder
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
European Research Council
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference22 articles.
1. Optical wafer metrology sensors for process-robust CD and overlay control in semiconductor device manufacturing
2. Optical Methods for Dimensional Metrology in Production Engineering
3. Detection of Hidden Gratings through Multilayer Nanostructures Using Light and Sound
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5. Picosecond acoustics as a non-destructive tool for the characterization of very thin films
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