Affiliation:
1. Nanjing Astronomical Instruments Co., Ltd., Chinese Academy of Sciences
Abstract
The radius of curvature (R) is a fundamental parameter of
spherical optical surfaces. The measurement range of the widely
adopted traditional interferometric method is limited by the length of
the precision linear guide rail carrying the measured surface from the
cat’s eye to the confocal position, and the test result is vulnerable
to airflow and vibration in the test environment. An interferometric
method is proposed for the radius measurement of spherical surfaces
based on a small axial moving distance and the corresponding defocus
wavefront to eliminate the dependence on a long guide rail and extend
the measuring range. To eliminate the influence of the test
environment and calculate the R, a defocus transform algorithm is
proposed to instantaneously measure the defocus wavefront from a
single interferogram. Numerical simulations theoretically demonstrate
that there is no limit to the measurement range of this method because
only a short distance of the measured mirror must be moved. A
spherical mirror with a radius of curvature of 101.6087 mm is
experimentally tested, and the relative measurement error is 0.037%.
This method can achieve high accuracy for optical shops and greatly
increase the measurement range of the interferometric method without
additional equipment.
Funder
National Key Research and Development
Program of China
Strategic Priority Research Program of
the Chinese Academy of Sciences
National Natural Science Foundation of
China
Nanjing International Science and
Technology Cooperation Project
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering