Abstract
We demonstrate lensless single-shot dual-wavelength digital holography
for high-speed 3D imaging in industrial inspection. Single-shot
measurement is realized by combining off-axis digital holography and
spatial frequency multiplexing of the two wavelengths on the detector.
The system has 9.1 µm lateral resolution and a 50 µm unambiguous depth
range. We determine the theoretical accuracy of off-axis
dual-wavelength phase reconstruction for the case of
shot-noise-limited detection. Experimental results show good agreement
with the proposed model. The system is applied to industrial metrology
of calibrated test samples and chip manufacturing.
Funder
Nederlandse Organisatie voor
Wetenschappelijk Onderzoek