Effect of line roughness on the diffraction intensities in angular resolved scatterometry
Author:
Publisher
The Optical Society
Reference23 articles.
1. Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry
2. Fieldstitching with Kirchhoff-boundaries as a model based description for line edge roughness (LER) in scatterometry
3. A novel method for pushing the limits of line edge roughness detection by scatterometry
4. Optical Fourier transform scatterometry for LER and LWR metrology
5. Characterization of correlated line edge roughness of nanoscale line gratings using small angle x-ray scattering
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