Writing waveguides inside monolithic crystalline silicon with nanosecond laser pulses-Reference-Cited by-同舟云学术

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Writing waveguides inside monolithic crystalline silicon with nanosecond laser pulses

Published:2016-10-19 Issue:21 Volume:41 Page:4875
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Chambonneau M.,Li Q.,Chanal M.,Sanner N.,Grojo D.

Funder

A*MIDEX project

Agence Nationale de la Recherche (ANR)

“Investissements d’Avenir” French Government program

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference15 articles.

1. Writing waveguides in glass with a femtosecond laser

2. Ultrafast laser direct writing and nanostructuring in transparent materials

3. Delocalization of femtosecond radiation in silicon

4. Self-limited underdense microplasmas in bulk silicon induced by ultrashort laser pulses

5. Delocalization of femtosecond laser radiation in crystalline Si in the mid-IR range

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2. Development of a selective wet-chemical etchant for precise 3D sculpting of silicon enabled by infrared non-linear laser modification;Optics & Laser Technology;2024-09

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4. Axicon-lens-doublet focusing for the fabrication of ultra-high-aspect-ratio structures through silicon with infrared ultrafast lasers;Laser + Photonics for Advanced Manufacturing;2024-06-20

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