Effect of the hydrogen concentration on the growth mechanism of sputtered hydrogenated silicon thin films
Author:
Funder
National Science Council of Taiwan
Publisher
The Optical Society
Subject
Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Microcrystalline silicon films and solar cells deposited by PECVD and HWCVD
2. Intrinsic microcrystalline silicon: A new material for photovoltaics
3. Investigation of hydrogen induced phase transition from a-Si:H to μc-Si:H using real time infrared spectroscopy
4. Direct Role of Hydrogen in the Staebler-Wronski Effect in Hydrogenated Amorphous Silicon
5. Determination of hydrogen concentration in a-Si and a-Ge layers by elastic recoil detection analysis
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1. Marked enhancement of the photoresponsivity and minority-carrier lifetime of BaSi2 passivated with atomic hydrogen;Physical Review Materials;2019-06-14
2. On the mechanisms of hydrogen-induced blistering in RF-sputtered amorphous Ge;CrystEngComm;2017
3. Influence of hydrogen passivation on the luminescence of Si quantum dots embedded in Si3Nx;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
4. Optimization of ICPCVD Amorphous Silicon for Optical MEMS Applications;Journal of Microelectromechanical Systems;2015-12
5. Effect of heat treatments on the properties of hydrogenated amorphous silicon for PV and PVT applications;Solar Energy;2015-09
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