Study of the side walls inclination angle after RIE process of piezotronic structures
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Published:2021-05-04
Issue:5
Volume:1
Page:96-100
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ISSN:0033-2097
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Container-title:PRZEGLĄD ELEKTROTECHNICZNY
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language:en
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Short-container-title:ELECTROTECHNICAL REVIEW
Author:
OWCZARZAK Sławomir
Publisher
Wydawnictwo SIGMA-NOT, sp. z.o.o.
Subject
Electrical and Electronic Engineering