Piezoelectric coefficient measurement of piezoelectric thin films: an overview
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference24 articles.
1. Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig
2. Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films
3. Measurement of piezoelectric coefficients of lead zirconate titanate thin films by the normal load method using a composite tip
4. Piezoelectric coefficient of GaN measured by laser interferometry
5. Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering
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