On the mechanism of gray scale patterning of Ag-containing As2S3 thin films
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference12 articles.
1. Photodoping of amorphous chalcogenides by metals;Kolobov;Adv. Phys.,1991
2. Development of chalcogenide glass photoresists for gray scale lithography;Kovalskiy;J. Non-Cryst. Solids,2006
3. Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists;Eisenberg;J. Non-Cryst. Solids,1996
4. PASS—a chalcogenide-based lithography scheme for I.C. fabrication;Kozicki;J. Non-Cryst. Solids,1991
5. High-resolution electron beam lithography with negative organic and inorganic resists;Bernstein;J. Vac. Sci. Technol. B,1988
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