Study on the performance of InGaN-based micro-LED by plasma etching combined with ion implantation process
Author:
Funder
National Science and Technology Council
Publisher
Elsevier BV
Reference23 articles.
1. Development of microLED;Lin;Appl. Phys. Lett.,2020
2. The micro-LED roadmap: status quo and prospects;Lin;J. Phys.: Photonics,2023
3. Improving the leakage characteristics and efficiency of GaN-based micro-light-emitting diode with optimized passivation;Lee;ECS J. Solid State Sci. Technol.,2020
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5. Surface reaction enhancement by UV irradiation during Si etching process with chlorine atom beam;Samukawa;Jpn. J. Appl. Phys.,2007
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