Influence of straggling on the analysis of ion implantation profiles using backscattering or nuclear reactions

Author:

Friedland E.

Publisher

Elsevier BV

Subject

General Medicine

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Temperature dependence of critical damage energies in diamond;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2002-05

2. Study of the diffusion behaviour of aluminium in silicon up to 900°C by nuclear reaction analysis;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-03

3. Range parameters of aluminium implants in medium and heavy mass metals;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-03

4. Range parameters of gold and lead in carbon and carbon in gold at reduced energies of 10−3 < ϵ < 1;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-03

5. Range Parameters of Aluminium Implanted Targets;Materials Science Forum;1997-05

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