Subject
Applied Mathematics,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Modelling and Simulation
Reference16 articles.
1. Burns, D.M., Bright, V.M., 1997. Nonlinear flexures for stable deflection of an electrostatically actuated micromirror. In: Proceedings of SPIE: Microelectronics Structures and MEMS for Optical Processing III, vol. 3226, pp. 125–135.
2. Cortopassi, C., Englander, O., 2001. Nonlinear springs for increasing the maximum stable deflection of MEMS electrostatic gap closing actuators. UC Berkeley. Available from: .
3. Deutsch, E.R., Bardhan, J.P., Senturia, S.D., Hocker, G.B., Youngner, D.W., Sinclair, M.B., Butler, M.A., A large-Travel vertical planar actuator with improved stability. In: IEEE-TRANSDUCERS 2003, Boston, 2003, pp. 352–355.
4. Modeling the electromechanical response of electrostatic actuators;Elata,2006
5. A novel method for measuring the strength of microbeams;Elata;J. Microelectromech. Sys.,2006
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