Electrocoagulation for removal of silica nano-particles from chemical–mechanical-planarization wastewater-Reference-Cited by-同舟云学术

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Electrocoagulation for removal of silica nano-particles from chemical–mechanical-planarization wastewater

Published:2005-03 Issue:1-3 Volume:254 Page:81-89
ISSN:0927-7757
Container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects
language:en
Short-container-title:Colloids and Surfaces A: Physicochemical and Engineering Aspects

Author:

Den Walter,Huang Chihpin

Publisher

Elsevier BV

Subject

Colloid and Surface Chemistry

Reference19 articles.

1. Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filtrations

2. SEMATECH International, International Technology Roapmap for Semiconductors, SEMATECH, Austin, TX, 2001.

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