Fluid flow in UV nanoimprint lithography with patterned templates-Reference-Cited by-同舟云学术

Fluid flow in UV nanoimprint lithography with patterned templates

Published:2017-04 Issue: Volume:173 Page:62-70
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Jain Akhilesh,Spann Andrew,Cochrane Andrew,Randall Schunk P.,Bonnecaze Roger T.

Funder

NASCENT Engineering Research Center

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference30 articles.

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4. Nanoimprinted semitransparent metal electrodes and their application in organic light-emitting diodes;Kang;Adv. Mater.,2007

5. Photonic crystals from step and flash imprint lithography;Taylor,2006

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