MEMS/microelectronics self-assembly based on analogy of Langmuir–Blodgett approach-Reference-Cited by-同舟云学术

MEMS/microelectronics self-assembly based on analogy of Langmuir–Blodgett approach

Published:2009-11 Issue:11 Volume:86 Page:2279-2282
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Liu Mei,Lu Yao,Zhang Jiangang,Xia Shanhong,Yang Jun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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4. Three-dimensional self-assembly of millimetre-scale components

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