Fabrication of nano-scaled patterns on ceramic thin films and silicon substrates by soft ultraviolet nanoimprint lithography-Reference-Cited by-同舟云学术

Fabrication of nano-scaled patterns on ceramic thin films and silicon substrates by soft ultraviolet nanoimprint lithography

Published:2010-05 Issue:5-8 Volume:87 Page:959-962
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Jim K.L.,Lee F.K.,Xin J.Z.,Leung C.W.,Chan H.L.W.,Chen Y.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference14 articles.

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3. Highly parallel mix-and-match fabrication of nanopillar arrays integrated in microfluidic channels for long DNA molecule separation

4. Fabrication ofPb(Zr,Ti)O3Microscopic Capacitors by Electron Beam Lithography

5. Formation of Cu2O quantum dots on SrTiO3 (100): Self-assembly and directed self-assembly

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