Author:
Joo Park Tae,Keun Kim Seong,Hwan Kim Jeong,Park Jaehoo,Cho Moonju,Woo Lee Suk,Hun Hong Sug,Seong Hwang Cheol
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
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5. Electrical properties of hafnium silicate gate dielectrics deposited directly on silicon
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