Author:
Hirai Yoshihiko,Yoshikawa Takashi,Morimatsu Masatoshi,Nakajima Masaki,Kawata Hiroaki
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Mold Surface Treatment for Imprint Lithography.
3. N. Yamazaki, Y. Kurashima, H. Hiroshima, M. Komuro, Ext. Abs. of the 51th spring meeting of Jpn. Soc. Appl. Phys. Tokyo, 30p-G-11, 2004
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22 articles.
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