Ab initio study of elastic properties of orthorhombic cadmium stannate as a substrate for the manufacture of MEMS devices-Reference-Cited by-同舟云学术

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Ab initio study of elastic properties of orthorhombic cadmium stannate as a substrate for the manufacture of MEMS devices

Published:2021-03 Issue: Volume:26 Page:101822
ISSN:2352-4928
Container-title:Materials Today Communications
language:en
Short-container-title:Materials Today Communications

Author:

Ongwen Nicholas O.,Ogam Erick,Otunga Henry O.

Publisher

Elsevier BV

Subject

Materials Chemistry,Mechanics of Materials,General Materials Science

Reference43 articles.

1. Micromachining for microelectromechanical systems (MEMS);Mamilla;Procedia Mater. Sci.,2014

2. CMOS MEMS fabrication technologies and devices;Qu;Micromachines,2016

3. A brittleness transition in silicon due to scale;Gerberich;J. Mater. Res.,2012

4. Electrical properties of nanostructured SiN films for MEMS capacitive switches;Koutsoureli;J. Micromechanics Microengineering,2017

5. Research on titanium nitride thin films deposited by reactive sputtering for MEMS applications;Merie;Appl. Surf. Sci.,2015

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1. DFT study on the structural, mechanical, electronic, optical and thermodynamic properties of recently synthesized MAX Phase compounds A3InC2 (A= Zr, Hf) under ambient and elevated pressure;Materials Today Communications;2024-08

2. Structural, mechanical, electronic and thermodynamic analysis of calcium aluminum silicate crystalline phases in stone wool insulation materials: A first-principles study;Materials Today Communications;2024-03

3. Investigating the Young's modulus of Cu-Al-Be shape memory alloy using a phase diagram, vibration spectroscopy and ultrasonic waves;Journal of Alloys and Compounds;2024-03

4. Band engineering on phase stability, bonding nature, electronic, mechanical, transport and magnetic properties of battery material - LiMn2O4: Ab initio approach;Materials Today Communications;2024-03

5. Tailoring the Mechanical Properties of X–C–Si (X = Al, Mg) Alloys for Aerospace and Automotive Industries: An ab Initio Study;Science of Advanced Materials;2024-02-01

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