Author:
Torres Matabosch N.,Kaynak M.,Coccetti F.,Wietstruck M.,Tillack B.,Cazaux J.L.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. On the reliability of electrostatic NEMS/MEMS devices: review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies;Zaghloul;Microelectron Reliab,2011
2. A ruthenium-based multimetal-contact RF MEMS switch with a corrugated diaphragm;Feixiang;J Microelectromech S,2008
3. Simion S, Bartolucci G, Marcelli R. Accurate design and yield analysis of tuneable distributed MEMS bandpass filter. In: Proceedings of GEMiC2006; 2006.
4. Kaynak M, Wietstruck M, Zhang W, Drews J, Knoll D, Korndorfer F, et al. MEMS module integration into SiGe BiCMOS technology for embedded system applications. In: Semiconductor conference dresden (SCD); 2011. p. 1–4.
5. Kaynak M, Korndorfer F, Wietstruck M, Knoll D, Scholz R, Wipf C, et al. Robustness and reliability of BiCMOS embedded RF-MEMS switch. In: IEEE 11th topical meeting on silicon monolithic integrated circuits in RF systems (SiRF). 17–19 January 2011; p. 177–180.
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