Author:
Briand D.,Beaudoin F.,Courbat J.,de Rooij N.F.,Desplats R.,Perdu P.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Pyrotechnic actuator: a new generation of Si integrated actuator for biomedical and micro-spacecraft application;Rossi;Sens & Act,1999
2. Micromachined metal oxide gas sensors: Opportunities to improve sensor performance;Simon;Sens & Act,2001
3. Operation and short-term drift of polysilicon-heated CMOS microstructures at temperature up to 1200 K;Ehmann;J Micromech Microeng,2001
4. Puigcorbé J, Vilà A, Gràcia I, Cané C, Morante JR. Dielectric micro-hotplate for integrated sensors: an electro-thermo-mechanical analysis. Tech. Digest of Transducers ’01, Munich, Germany, June 10–14th, 2001, p. 312–5.
5. Beaudoin F, Desplats R, Perdu P, Boit C. Principles of Thermal Laser Stimulation Techniques, Microelectronics Failure Analysis, EDFAS Desk Reference Fifth Edition, p. 417–425, 2004.
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