Reliability of automotive and consumer MEMS sensors - An overview-Reference-Cited by-同舟云学术

Reliability of automotive and consumer MEMS sensors - An overview

Published:2021-11 Issue: Volume:126 Page:114252
ISSN:0026-2714
Container-title:Microelectronics Reliability
language:en
Short-container-title:Microelectronics Reliability

Author:

Hommel M.,Knab H.,Yousef S. Galal

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

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2. Patent DE4241045C1: Verfahren zum anisotropen Ätzen von Silicium. published May, 26th (1994), Assignee: Robert Bosch GmbH, Inventors: Franz Lärmer, Andrea Schilp.

3. AEC-Q100 Rev. H (2014).

4. AEC-Q103-002 (2019).

5. Stress-test-driven Qualification of Integrated Circuits,2017

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