Numerical prototyping methods in microsystem accelerometers design

Author:

Dowhań Łukasz,Wymysłowski Artur,Kaliciński Stanisław,Janus Paweł

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction;Galayko;J Micromech Microeng,2003

2. High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment;Galayko;IEEE,2002

3. On the normal boundary intersection method for generation of efficient front;Shukla,2007

4. Towards numerical prototyping of labs-on-chip: modeling for integrated microfluidic devices;Erickson;Microfluid Nanofluid,2005

5. Design of hybrid integrated capacitive acceleration sensor;Xi-hong;ICECE Proc,2010

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1. Micromanufacturing: A review—Part I;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2014-08-01

2. Fabrication of high aspect ratio comb-drive actuator using deep X-ray lithography at Indus-2;Microsystem Technologies;2014-06-17

3. Flexible stop and double-cascaded stop to improve shock reliability of MEMS accelerometer;Microelectronics Reliability;2014-06

4. Developing high aspect ratio comb-drive using synchrotron radiation at Indus-2;AIP Conference Proceedings;2013

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