Highly efficient removal of sapphire by composite nanoabrasive with novel inorganic polyelectrolyte as a binder
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference32 articles.
1. Step-edge-Guided nucleation and growth of aligned WSe2 on sapphire via a layer-over-layer growth mode;Chen;ACS Nano,2015
2. In GaN-based light-emitting diodes grown on various aspect ratios of concave nanopattern sapphire substrate;Ke;Appl. Surf. Sci.,2018
3. Surface-guided CsPbBr3 perovskite nanowires on flat and faceted sapphire with size-dependent photoluminescence and fast photoconductive response;Oksenberg;Nano Lett.,2017
4. High-harmonic generation by resonant plasmon field enhancement;Kim;Nature,2008
5. Preparation of MgO doped colloidal SiO2 abrasive and their chemical mechanical polishing performance on c-, r- and a-plane sapphire substrate;Yin;Ceram. Int.,2018
Cited by 15 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of EDTA-modified alumina composite abrasive on the CMP performance of sapphire substrate;Materials Chemistry and Physics;2024-01
2. Nanomaterials and Equipment for Chemical–Mechanical Polishing of Single-Crystal Sapphire Wafers;Coatings;2023-12-14
3. Effect of the carboxyl group number of the complexing agent on polishing performance of alumina slurry in sapphire CMP;Ceramics International;2023-05
4. Chemical–Mechanical Polishing of 4H Silicon Carbide Wafers;Advanced Materials Interfaces;2023-04-04
5. A novel green chemical mechanical polishing for potassium dihydrogen phosphate using corn oil slurry;Materials Today Sustainability;2022-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3