Effects of AlOx incorporation into atomic layer deposited Ru thin films: Applications to Cu direct plating technology

Author:

Hong Tae Eun,Cheon Taehoon,Kim Soo-Hyun,Kim Jeong-Kyu,Park Young-Bae,Kwon Oh Joong,Kim Myung Jun,Kim Jae Jeong

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference48 articles.

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2. D. Edelstein, C. Uzoh, C. Cabral Jr., P. DeHaven, P. Buchwalter, A. Simon, E. Cooney III, S. Malhotra, D. Klaus, H. Rathore, B. Agarwala, D. Bguyen, in: A.J. McKerrow, Y. Shacham-Diamand, S. Zaima, T. Ohba (Eds.), Advanced Metallization Conference in 2001, Mater. Res. Soc. Proc. Warrendale, PA, 2002, pp. 541–547.

3. Size-dependent resistivity of metallic wires in the mesoscopic range

4. Alteration of Cu conductivity in the size effect regime

5. Seedless Superfill: Copper Electrodeposition in Trenches with Ruthenium Barriers

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