Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique-Reference-Cited by-同舟云学术

Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique

Published:2019-01 Issue: Volume:772 Page:112-121
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Ding Ji Cheng,Wang Qi Min,Liu Zhe Ren,Jeong Seonhee,Zhang Teng Fei^ORCID,Kim Kwang Ho

Funder

Global Frontier Hybrid Interface Materials

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference35 articles.

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2. A study of the oxidation behavior of CrN and CrZrN ceramic thin films prepared in a magnetron sputtering system;Khamseh;Ceram. Int.,2016

3. Wear tests of ZrC and ZrN thin films grown by pulsed laser deposition;Dorcioman;Appl. Surf. Sci.,2014

4. Effects of negative bias voltage and ratio of nitrogen and argon on the structure and properties of NbN coatings deposited by HiPIMS deposition system;Ding;Coatings,2018

5. Study of the oxidation of aluminium nitride coatings at high temperature;Ansart;Thin Solid Films,1995

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