Effect of annealing on the structural, optical and surface properties of chromium oxide (Cr2O3) thin films deposited by e-beam evaporation for plasma etching applications-Reference-Cited by-同舟云学术

Effect of annealing on the structural, optical and surface properties of chromium oxide (Cr2O3) thin films deposited by e-beam evaporation for plasma etching applications

Published:2021-09 Issue: Volume:875 Page:160087
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Ekinci Huseyin^ORCID,Soltani Mohammad^ORCID,Jahed Navid M.S.,Zhu Xiaoli,Cui Bo,Pushin Dmitry

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

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