Hydrogen permeation through silicon nitride films-Reference-Cited by-同舟云学术

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Hydrogen permeation through silicon nitride films

Published:2012-10 Issue: Volume:539 Page:184-189
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Nemanič Vincenc,McGuiness Paul J.,Daneu Nina,Zajec Bojan,Siketić Zdravko,Waldhauser Wolfgang

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference28 articles.

1. High-Temperature Structural Ceramics

2. Silicon Nitride and Related Materials

3. Dynamic behavior of hydrogen in silicon nitride and oxynitride films made by low-pressure chemical vapor deposition

4. Hydrogen role on the properties of amorphous silicon nitride

5. Determination of the hydrogen concentration of silicon nitride layers by Fourier transform infrared spectroscopy

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