Grinding performance of pellet prepared using nanosize ceria particles
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference16 articles.
1. On the Chemo-Mechanical Polishing (CMP) of Si3N4 Bearing Balls With Water Based CeO2 Slurry
2. Continuous hydrothermal processing of nano-crystalline particulates for chemical-mechanical planarization
3. Chemical mechanical polishing of polymer films
4. Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria
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