Anodic bondable Li-Na-Al-B-Si-O glass-ceramics for Si - ULTCC heterogeneous integration-Reference-Cited by-同舟云学术

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Anodic bondable Li-Na-Al-B-Si-O glass-ceramics for Si - ULTCC heterogeneous integration

Published:2019-07 Issue:7 Volume:39 Page:2419-2426
ISSN:0955-2219
Container-title:Journal of the European Ceramic Society
language:en
Short-container-title:Journal of the European Ceramic Society

Author:

Chen Guanyu,Ma Mingsheng^ORCID,Liu Zhifu,Wei Anqing,Zavabeti Ali,Hu Xinyi,Zhang Faqiang,Wang Bing,Mitchell Arnan,Li Yongxiang^ORCID

Funder

National Key Research and Development Program of China

NSFC-Guangdong Joint Fund

Chinese National Nature Science Foundation

UCAS Joint PhD Training Program

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference42 articles.

1. Heterogeneous integration for on-chip quantum photonic circuits with single quantum dot devices;Davanco;Nat. Commun.,2017

2. Three-dimensional hybrid integration technology of CMOS, MEMS, and photonics circuits for optoelectronic heterogeneous integrated systems;Lee;IEEE Trans. Electron Devices,2011

3. Heterogeneous integration for mid-infrared silicon photonics;Spott;Ieee J. Sel. Top. Quantum Electron.,2017

4. Semiconductor wafer bonding: science and technology;Tong;Phys. Status Solidi,1998

5. Research on low-temperature anodic bonding using induction heating;Chen;Sens. Actuators A-Phys.,2007

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