Funder
National Science Foundation
Subject
Materials Chemistry,Ceramics and Composites
Reference45 articles.
1. Processing, structure, properties, and applications of PZT thin films;Izyumskaya;Crit. Rev. Solid State Mater. Sci.,2007
2. Piezoelectric thin films for sensors, actuators, and energy harvesting;Muralt;MRS Bull.,2009
3. Piezoelectric MEMS for energy harvesting;Kim;MRS Bull.,2012
4. Thin-film piezoelectric MEMS;Eom;MRS Bull.,2012
5. Piezoelectric sensors and sensor materials;Tressler;J. Electroceram.,1998
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