Author:
Chen Hong,Shen Shaoqun,Bao Minhang
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference4 articles.
1. L.M. Roylance and J.B. Angell, A batch-fabricated silicon accelerometer, IEEE Trans. Electron Devices, ED-26 (1979) 1911–1917.
2. H.V. Allen, S.C. Terry and D.W. De Bruin, Accelerometer systems with self-testable features, Sensors and Actuators, 20 (1989) 153–161.
3. Minhang Bao, Jian Chen and Shaoqun Shen, A micromechanical structure eliminating lateral effect of silicon accelerometer, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24–28 June, 1991, pp. 101–103.
4. D.W. De Bruin, H.V. Allen and S.C. Terry, Second order effects in self-testable accelerometers, Tech. Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June 1990, pp. 149–152.
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