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2. Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique;Suzuki;SAE Paper No. 910274,1991
3. Study of the behavior of the seismic mass of a PWM electrostatic servo accelerometer;Tsuchitani;Trans. Soc. Instrumentation and Control Engineering (SICE),1993
4. Sensors and sensing technology for intelligent vehicle era;Sasayama,1994
5. A multi-step anisotropic etching process for producing 3-D silicon accelerometers;Koide,1992