High-resolution micro-fluxgate sensing elements using closely coupled coil structures

Author:

Kawahito Shoji,Satoh Hiroshi,Sutoh Masayaki,Todokoro Yoshiaki

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. The fluxgate magnetometer;Primdahl;J. Phys. E: Sci. Instrum.,1979

2. Review of fluxgate sensor;Ripka;Sensors and Actuators A,1992

3. Fluxgate sensor in planar microtechnology;Seitz;Sensors and Actuators,1990

4. A fluxgate magnetic sensor with micromachined solenoids and electroplated permalloy cores;Kawahito,1993

5. Miniature fluxgate sensing element for high-performance integrated silicon magnetic sensors;Kawahito;Sensors Mater.,1994

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