Integrated thermal-conductivity vacuum sensor-Reference-Cited by-同舟云学术

Integrated thermal-conductivity vacuum sensor

Published:1997-01 Issue:1 Volume:58 Page:37-42
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Klaassen Erno H,Kovacs Gregory T.A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Vacuum Technology, An Introduction;Carpenter,1970

2. Thermal vacuum sensors based on integrated silicon thermopiles;van Herwaarden,1987

3. Fabrication and performance of a fully integrated μ-Pirani pressure gauge with digital readout;Mastrangelo,1991

4. A broad range absolute pressure microsensor;James,1988

5. Novel integrated thermal pressure gauge and read-out circuit by CMOS IC technology;Paul,1994

Cited by 31 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Efficient and Accurate System-Level Simulation Compatible Macromodel for MEMS Diode-Based Micro-Pirani Vacuum Sensor;IEEE Sensors Journal;2024-08-01

2. Micromachined Thermocouple for Rapid Detection of Ultrahigh Heat Flux at High Temperature;IEEE Transactions on Industrial Electronics;2022-02

3. Compact micro-Pirani vacuum sensor based on series diodes without heating structure;Sensors and Actuators A: Physical;2019-04

4. Integrated Vacuum Microsensor Systems in CMOS Technology;Micro/Nano Technologies;2018

5. 14 • Capteurs de mesure du vide;Les capteurs en instrumentation industrielle;2017-11-08