Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators-Reference-Cited by-同舟云学术

Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators

Published:1996-07 Issue:1 Volume:55 Page:65-69
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Mark Noworolski J.,Klaassen Erno H.,Logan John R.,Petersen Kurt E.,Maluf Nadim I.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Electrostatic-comb drive of lateral polysilicon resonators;Tang;Sensors and Actuators,1990

2. Deformable-mirror spatial light modulators;Hornbeck,1990

3. Magnetic microactuation of torsional polysilicon structures;Judy;Sensors and Actuators A,1996

4. Surface micromachined linear thermal microactuator;Judy,1990

5. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system;Ataka;J. Microelectromech. Syst.,1993

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