A novel micromachined pump based on thick-film piezoelectric actuation-Reference-Cited by-同舟云学术

A novel micromachined pump based on thick-film piezoelectric actuation

Published:1998-10 Issue:1-2 Volume:70 Page:98-103
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Koch Michael,Harris Nick,Evans Alan G.R.,White Neil M.,Brunnschweiler Arthur

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Piezoelectric micropump based on micromachining of silicon;van Lintel;Sensors and Actuators,1988

2. Thermopneumatic micropump based on micro-engineering techniques;Pol;Sensors and Actuators A,1990

3. Simulation of microfluid systems;Zengerle;J. Micromechanics Microeng. A,1994

4. A silicon membrane micropump with integrated bimetallic actuator;Zhan;Chin. J. Electron.,1996

5. Electrohydrodynamic pumping and flow measurement;Richter,1991

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