Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip-Reference-Cited by-同舟云学术

Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

Published:1998-10 Issue:1-2 Volume:70 Page:148-152
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sato Kazuo,Yoshioka Tetsuo,Ando Taeko,Shikida Mitsuhiro,Kawabata Tatsuo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Fatigue of microlithographically-patterned free-standing aluminum thin film under axial stresses;Read;Trans. ASME, J. Electron. Packaging,1995

2. In situ tensile strength measurement of thick-film and thin-film micromachined structure;Greek,1995

3. Tensile testing of epitaxial silicon films;Cunningham,1995

4. Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films;Tsuchiya,1997

5. Micro tensile-test system fabricated on a single crystal silicon chip;Sato,1996

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