Author:
Xiao Zhixiong,Chen Min,Wu Guoying,Zhao Changde,Zhang Dacheng,Hao Yilong,Zhang Guobing,Li Zhihong
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. An integrated force-balance capacitive accelerometer for low-g applications;Chau;Sensors and Actuators A,1996
2. Integrated silicon capacitive accelerometer with PLL servo technique;Matsumoto;Sensors and Actuators A,1993
3. Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability;Zimmermann;Sensors and Actuators A,1995
4. Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer;van Kampen;Sensors and Actuators A,1994
5. B.P. van Drieënhuizen, N.I. Maluf, I.E. Opris, G.T.A. Kovacs, Force-balanced accelerometer with mG resolution, fabricated using silicon fusion bonding and deep reactive ion etching, 1997 International Conference on Solid-state sensors and Actuators, Chicago, 1229–1230.
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献