1. Silicon as a mechanical material;Peterson;Proc. IEEE,1982
2. Deformable mirror for spatial light modulators, spatial light modulators and applications III;Hornbeck;SPIE Crit. Rev.,1989
3. L.J. Hornbeck, Current status of the digital micromirror device (DMD) for projection television application, Tech. Digest IEDM, Washington, USA, 1993, pp. 381–384.
4. M.-H. Kiang, D.A. Francis, C.J. Chang-Hasnain, O. Solgaard, K.Y. Lau, R.S. Muller, Actuated polysilicon micromirrors for raster-scanning displays, TRANSDUCERS '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, June 16–19, pp. 323–326.
5. Electrostatically deflectable polysilicon torsional mirrors;Fischer;Sensors and Actuators A,1994