Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators

Author:

Zook J.David,Herb William R,Bassett C.J,Stark Terry,Schoess Jeff N,Wilson Mark L

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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2. Micromachined vibration sensor with on-chip circuitry and optical interconnects;Peiner;Sens. Actuators, A,1998

3. J.D. Zook, W.R. Herb, Y. Ahn, H. Guckel, Polysilicon sealed vacuum cavities for MEMS, J. Am. Vac. Soc., submitted for publication.

4. Sealed-cavity resonant microbeam pressure sensor;Burns;Sens. Actuators, A,1995

5. Sealed-cavity resonant microbeam accelerometer;Burns;Sens. Actuators, A,1996

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