A low-cost micromechanical accelerometer with integrated solid-state sensor-Reference-Cited by-同舟云学术

A low-cost micromechanical accelerometer with integrated solid-state sensor

Published:2000-08 Issue:1-2 Volume:84 Page:149-155
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Haronian Dan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. D. Haronian, Direct Integration of solid state stress sensors with single crystal micro-electro-mechanical systems: theory and applications, submitted to the Journal of Microelectromechanical Systems.

2. D. Haronian, Direct Integration (DI) of solid state stress sensors with single crystal micro-electro-mechanical systems for integrated displacement sensing, MEMS '99, January 17–21, Buena Vista Palace Resort, Orlando, FL, pp. 88–93.

3. Experimental tunnel-diode electromechanical transducer elements and their use in tunnel-diode microphones;Rogers;J. Acoust. Soc. Am.,1962

4. Transistor microphone;Sikorski;Rev. Sci. Instrum.,1962

5. A new uniaxial accelerometer in silicon based on the piezo junction effect;Puers;IEEE Trans. Electron Devices,1988

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