Structuring of membrane sensors using sacrificial porous silicon-Reference-Cited by-同舟云学术

Structuring of membrane sensors using sacrificial porous silicon

Published:2000-09 Issue:3 Volume:84 Page:315-323
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hedrich F,Billat S,Lang W

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

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3. Bulk and surface micromachining using porous silicon sacrificial layer technologies;Bischoff;Proc. Eurosensors X, Leuven, Belgium,1996

4. Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap;Kronast,1998

5. Porous silicon as a sacrificial material;Bell;J. Micromech. Microeng.,1996

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