Thinfilm technologies to fabricate a linear microactuator-Reference-Cited by-同舟云学术

Thinfilm technologies to fabricate a linear microactuator

Published:2001-06 Issue:1-2 Volume:91 Page:145-149
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Föhse M,Kohlmeier T,Gatzen H.H

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. R. Belmans, K. Hameyer, Electromagnetic and design aspects of magnetic mini-actuators, Proc., Actuator (1998) 537–540.

2. H.H. Gatzen, H.-D. Stölting, S. Büttgenbach, H. Dimigen, A novel variable reluctance micromotor for linear actuation, Proc., Actuator (2000), Bremen (accepted).

3. Parameters influencing the electrodeposition of Ni–Fe alloys;Kieling;Surf. Coatings Technol.,1997

4. Nanogrinding, precision engineering;Gatzen;J. ASPE,1996

5. Precision machining of rigid disk head sliders;Gatzen;IEEE Transac. Magnetics,1996

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