Author:
Hirscher S,Kaesmaier R,Domke W.-D,Wolter A,Löschner H,Cekan E,Horner C,Zeininger M,Ochsenhirt J
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference3 articles.
1. R. Kaesmaier, H. Löschner, Proc. SPIE 3997 (2000).
2. Chemically amplified deep ultraviolet resist for positive tone ion exposure
3. The Stopping and Ranges of Ions in Solids;Ziegler,1985
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