Fully automatic VLSI diagnosis in a CAD-linked E-beam probing system-Reference-Cited by-同舟云学术

Fully automatic VLSI diagnosis in a CAD-linked E-beam probing system

Published:1987-01 Issue:2-4 Volume:7 Page:283-293
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Melgara M.,Battu' M.,Garino P.,Dowe J.,Marzouki M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Electron beam testing of VLSI circuits;Wolfgang;IEEE Trans. on Electr. Dev.,1979

2. Electron beam test system for VLSI circuit inspection;Menzel;Scanning Electron Microscopy,1979

3. Evaluation of performances of a commercial E-beam testing system;Cocito;Scanning Electron Microscopy,1983

4. Towards automatic failure analysis of complex ICs through E-beam testing;Berger,1986

5. Software integration in a workstation-based E-beam tester;Concina,1986

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1. Automatic fault tracing by successive circuit extraction from CAD layout data with the CAD-linked EB test system;Microelectronics Reliability;1998-06

2. An integrated electron-beam probing environment with a simulation interface and CAD navigation;Microelectronic Engineering;1994-03

3. Introduction;Electron Beam Testing Technology;1993

4. Industrial Case Studies;Electron Beam Testing Technology;1993

5. Timing diagram: A new electron-beam test technique for linking IC-internal measurements to simulation;Microelectronic Engineering;1990-05