Efficient nanoscale characterization of wafer surfaces using intelligent sampling and Bayesian optimization

Author:

Shafiq MuhammadORCID,Saravanan Varathan.,Ratna Kandavalli Sumanth,Surendranath Srigitha,Soundara Pandian Shalini,Sreenivasa Rao Vuda

Publisher

Elsevier BV

Reference22 articles.

1. PDE-constrained Gaussian process model on material removal rate of wiresaw slicing process modeling, submitted to ASME Transactions;Zhao;J. Manuf. Sci. Eng.,2010

2. A discrete system model for form error control in surface grinding;Huang;Int. J. Mach. Tool Manu.,2010

3. Vertical nanowire FET integration and device aspects;Veloso;ECS Trans.,2016

4. Quantum engineering of transistors based on 2D materials heterostructures;Iannaccone;Nat. Nanotechnol.,2018

5. A 10nm high performance and low-power CMOS technology featuring 3rd generation FinFET transistors, Self-Aligned Quad Patterning, contact over active gate and cobalt local interconnects;Auth,2017

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