Dry etching of Ga2O3-Reference-Cited by-同舟云学术

Dry etching of Ga2O3

Published:2019 Issue: Volume: Page:263-285
ISSN:
Container-title:Gallium Oxide
language:
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Author:

Khanna Rohit,Bevlin Kristen,Geerpuram Dwarakanath,Yang Jiancheng,Ren F.,Pearton Stephen

Funder

Defense Threat Reduction Agency

Publisher

Elsevier

Reference50 articles.

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