1. SUPREM II—A Program of IC Process Model and Simulation;Antoniadis,1978
2. A general simulation for VLSI lithography and etching process: Part I—Application to projection litholography;Oldham;IEEE Trans. Electron Devices,1979
3. A general simulator for VLSI lithography and etching process: Part II—Application to deposition and etching;Oldham;IEEE Trans. Electron Devices,1980
4. Process modeling and design procedure for IGFET thresholds;Geipel;IEEE J. Solid-State Circuits,1979
5. Two-dimensional numerical simulation of impurity redistribution in VLSI process;Tielert;IEEE Trans. Electron Devices,1980