Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFM-Reference-Cited by-同舟云学术

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Nanotribological characterization of molecularly thick lubricant films for applications to MEMS/NEMS by AFM

Published:2003-10 Issue:1-4 Volume:97 Page:321-340
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Liu Huiwen,Bhushan Bharat

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference49 articles.

1. Anonymous, Microelectromechanical Systems: Advanced Materials and Fabrication Methods, NMAB-483, National Academy Press, Washington, DC, 1997.

2. M. Roukes, Phys. World (2001) 25.

3. M.A. Huff, A distributed MEMS processing environment, http://www.mems-exchange.org/, 2002.

4. Tribology Issues and Opportunities in MEMS;Bhushan,1998

5. Handbook of Micro/Nanotribology;Bhushan,1999

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